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| Parameter | Specification |
|---|---|
| Model | VMS-5040H |
| Metal Table Size | 786 × 636 mm |
| Glass Table Size | 570 × 470 mm |
| Travel (X, Y) | 470 × 370 mm |
| Z-Axis Travel | 200 mm (Can be customized to 400 mm) |
| Linear Scale Resolution | 0.5 μm |
| Indication Error | E1XY = (2.5 + L/100) μm |
| Video System | 1/2” color CCD camera |
| Zoom Lens | 0.7 ~ 4.5× zoom lens (Total magnification: 20 ~ 128× on 19.5" display, Resolution: 1440 * 900) |
| Field of View | 11.1 mm ~ 1.7 mm |
| Dimension (L × W × H) | 1200 × 1270 × 1870 mm |
| Weight | 850 kg |
| Power Supply & Power | AC 100-240V, 50/60Hz; Power: 400W (excluding PC) / Max 1800W System Power |
| Computer Configuration | Brand computer (standard configuration included) |